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An introduction to the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter has been added on the laser-assisted wet chemical micro-etching. This is a new method for direct 3-D micro-structuring of solids, with a number of potential applications.

Boekdetails

Serie: Springer Series in Materials Science
Ondertitel: Springer Series in Materials Science

Formaat

Hardback

Uitgever

Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

Imprint

Springer-Verlag Berlin and Heidelberg GmbH & Co. K

Auteur

S.M. Metev (Bremen Institute of Applied Beam Technology, Bremen, Germany) || V.P. Veiko (Institute of Fine Mechanics and Optics, St Petersburg, Russia), Springer-Verlag Berlin and Heidelberg GmbH & Co. K, Springer-Verlag Berlin and Heidelberg GmbH & Co. KG

ISBN-13

9783540639732

Verschijningsdatum

1998-07-17

Editie

2nd edition

Land van herkomst

DE

Hardback

Laser-Assisted Microtechnology

door S.M. Metev (Bremen Institute of Applied Beam Technology, Bremen, Germany) || V.P. Veiko (Institute of Fine Mechanics and Optics, St Petersburg, Russia)

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