The book covers extensive and systematic measurement study of the MEMS switches that includes mechanical, electrical, transient, linearity, power handling, temperature stability, loss and reliability. Study of switch reliability is one of the critical features in this book.

Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters discusses radio frequency microelectromechanical systems (RF MEMS)-based control components and will be useful for researchers and R&D engineers. It offers an in-depth study, performance analysis, and extensive characterization on micromachined switches and phase shifters. The reader will learn about basic design methodology and techniques to carry out extensive measurements on MEMS switches and phase shifters which include electrical, mechanical, power handling, linearity, temperature stability, reliability, and radio frequency performance. Practical examples included in the book will help readers to build high performance systems/subsystems using micromachined circuits.

Key Features

• Provides simple design methodology of MEMS switches and switching networks including SPST to SP16T switches
• Gives an in-depth performance study of micromachined phase shifters. Detailed study on reliability and power handling capability of RF MEMS switches and phase shifters presented
• Proposes reconfigurable micromachined phase shifters
• Verifies a variety of MEMS switches and phase shifters experimentally