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Beschrijving

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In the 50 years since the invention of transistor, silicon integrated circuit (IC) technology has made astonishing advances. In state of the art silicon Ie manufacturing process, plasma is used in more than 20 different critical steps.

Boekdetails

Formaat
hardcover
Uitgever
Springer
Imprint
Springer London Ltd
Auteur
Cheung, Kin P., Springer London Ltd, Springer
ISBN-13
9781852331443
Verschijningsdatum
2000-10-04T00:00:01Z
Pagina's
358
Taal
english
Editie
2001
Afmetingen
27 mm × 239 mm × 164 mm
Gewicht
680 g
Land van herkomst
US

hardcover

Plasma Charging Damage

door Cheung, Kin P.

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