Micromachined Devices and Components V

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Beschrijving

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These conference proceedings consist of 32 papers discussing a range of aspects of micromachined devices and components.

Boekdetails

Formaat: Paperback / softback
Uitgever: SPIE Press
Imprint: SPIE Press
Auteur: French, SPIE Press, SPIE Press
ISBN-13: 9780819434739

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