Designed as an introduction to the field for undergraduate students of electronics engineering and materials science, this text presents the principles and development of microtechnology. The book includes instructional objectives, self-evaluation questions and problems.

Written as a "first exposure" to semiconductor microtechnology, this classic text places emphasis on the principles of the topic. The text presents an introduction to the development of microtechnology; is concerned with the growth and preparation of semiconducting materials; discusses the process of doping and type-conversion, and the twin technologies of diffusion and ion implantation; deals with oxidation, the process of photolithography, metallization, interconnections, and bonding; considers the structure and processing of circuit components and integrated circuits; and speculates on future trends in semiconductor microtechnology. Fully revised and updated, this second edition is presented in a more reader- friendly style, including instructional objectives and self- evaluation questions, plus problems at the ends of chapters. No particular mathematics skills or specialist knowledge is needed to be able to use this text effectively.